Nonlinear-optical system for local express inspection of semiconductor crystal quality
P.E.Berezhnaya and M.F.Stupak
Novosibirsk
Pages: 106–114
Abstract
The effect of generation of the second harmonic of the probing laser emission is used for express, local, nondestructive inspection of the quantitative and qualitative crystal characteristics of materials. Specification is presented and potentialities of a computer-aided laser system for output inspection of semiconductor crystal parameters are described. The system will determine during several minutes the crystallographic axes orientation with an error of in local surface regions ( m in diameter and 0.1
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