Measurement and correction of the laser beam trajectory in circular writing systems.
V. P. Korolkov
Novosibirsk
Pages: 12–22
Abstract
Circular scanning laser writing systems are effectively used in fabrication of diffractive optical elements, micro-optics, coded disks, and limbs. However, the accuracy of microstructure fabrication by means of such systems depends substantially on the radial spindle runout that causes deviation of the writing beam trajectory from a circular form. Knowing the dependence of this deviation on the angle of rotation, one will compensate for the influence of spindle runout by correcting the radial beam position. A new photoelectric method for measuring the writing beam trajectory is proposed for circular scanning systems. Results of its application to correct the beam position by an electromagnetic deflector are discussed.
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