Interference Microscope-Profilometer
E. V. Sysoev, I. A. Vykhristyuk, R. V. Kulikov, A. K. Potashnikov, V. A. Razum, L. M. Stepnov
Keywords: optical profilometer, scanning interferometer of partially coherent light, nanorelief, 3Dreconstruction, microrelief
Pages: 119-128
Abstract
The structure and functional capabilities of a digital optical microscope-profilometer capable of operating in two modes, those of micro- and nanomeasurements, are presented. The instrument operation principle is based on measuring the phase function of the wave front of light scattered by the measured surface. Software for the microscope-profilometer and its performance characteristics are considered.
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