CAPACITANCE MEMS ACCELEROMETERS FOR MEASURING HIGH-g ACCELERATIONS
I. L. Baginskii, E. G. Kostsov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, prosp. Akademika Koptyuga, 1
Keywords: МЭМС-акселерометр, электростатика, электрет, сверхвысокие ускорения, MEMS accelerometer, electrostatics, electret, high-g accelerations
Abstract
A possibility of creating a capacitance accelerometer for measuring high- g accelerations (up to 106 g and higher) is discussed. It is demonstrated that insertion of a thin electret film with a high surface potential into the gap between the electrodes ensures significant expansion of the frequency and amplitude ranges of acceleration measurements, whereas the size of the proposed device is smaller than that of available MEMS accelerometers for measuring high-$g$ accelerations. A mathematical model of an electret accelerometer for high- g accelerations is developed, and the main specific features of accelerometer operation are analyzed.
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