THREE-AXIAL MICROOPTOELECTROMECHANICAL ANGULAR RATE TRANSDUCER BASED ON THE OPTICAL TUNNELING EFFECT
V. I. Busurin1, A. T. Fam1, M. A. Zheglov2, V. M. Medvedev1,2
1Moscow Aviation Institute, Volokolamskoe Shosse 4, 125993, Moscow, A-80, GSP-3
2State Scientific Research Institute of Instrument Making, prosp. Mira 125, Moscow, 129226
Keywords: трёхосевой МОЭМ-преобразователь, туннельный эффект, угловая скорость, минимальная детектируемая величина, шумы, динамический диапазон, three-axial MOEM transducer, tunnel effect, angular rate, minimum detectable value, noise, dynamic range
Abstract
A three-axial microoptoelectromechanical (MOEM) angular rate transducer model based on the optical tunneling effect has been developed. The transfer function has been determined, and the effect of destabilizing factors on the characteristics of the triaxial MOEM angular rate transducer has been evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect has been calculated.
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