DETERMINATION AND CORRECTION OF ERRORS IN SIGNALS QUADRATURE DETECTORS OF LASER INTERFEROMETERS
F. A. Zhuravel, A. I. Skurlatov, A. M. Shcherbachenko
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: гетеродинный лазерный интерферометр, акустооптический модулятор лазерного излучения, квадратурная дискретизация, подвижный элемент MEMS, heterodyne laser interferometer, acousto-optic modulator of laser radiation, quadrature sampling, moving element MEMS
Abstract
Errors of laser interferometers using quadrature detectors depend not only on the interferometers themselves, but also on the electronic systems for processing quadrature signals. There are three sources of errors of quadrature detector signals that affect the displacement measurement error of: the inequality of the amplitudes of quadrature signals, the phase shift of these signals (not equal to 90◦), and the zero offset in each signal. A simple method for identifying and correcting these errors based on experimental data on signals obtained using analog-to-digital converters is considered. The proposed method is applicable to any interferometer with sinusoidal quadrature outputs
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