INFLUENCE OF CHANGES IN THE THERMOPHYSICAL PROPERTIES OF MOLYBDENUM THIN FILMS ON THE LASER ABLATION PROCESS
S.D. Poletayev
Image Processing Systems Institute, Russian Academy of Sciences, Federal State Research Center "Crystallography and Photonics", Russian Academy of Sciences, Samara, Russia
Keywords: COMSOL modeling, thin films, laser ablation, diffraction grating, resolution
Abstract
The effect of changes in the thermophysical properties of the molybdenum film during intermediate oxidation during laser ablation on the dimensional effect of track formation is investigated by numerical simulation. In accordance with the data obtained, the hypothesis explaining the reduction of the track width in the ablation zone of the film in comparison with the effective diameter of the laser beam is refined. It is shown that a specific change in the thermal conductivity coefficient of a substance at the time of oxidation has a significant effect on the distribution of the temperature field, expressed in narrowing of the characteristic of the temperature distribution over the film surface, which has not been previously considered. It is established that the change in the density, specific heat capacity, and thermal effect of the chemical reaction of molybdenum oxidation during film oxidation does not significantly affect the temperature distribution in the zone of exposure to the laser beam.
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