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Avtometriya

2022 year, number 5

MULTIELEMENT IR FPA-BASED THERMAL IMAGING MICROSCOPE

Irlam I. Lee, Vladimir G. Polovinkin
A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: multielement infrared focal plane array, microscope, read-out integrated circuit (ROIC), temperature resolution, spectral range

Abstract

Design principles for the implementation of an infrared microscope registering the intrinsic thermal radiation of objects are considered. The infrared microscope temperature resolution, depending on the optical system parameters, design and photoelectric parameters of multielement infrared focal plane arrays (IR FPAs) are analyzed.