TWO-DIMENSIONAL ELECTROMECHANICAL WAVES IN MEMS STRUCTURES WITH A NANOGATE
A.A. Sokolov, S.D. Ivanov
Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: MEMS, microbeam, flat plate, two-dimensional system
Abstract
The system "movable electrode - nanometer gap - thin crystalline film of a material with a high value of dielectric permittivity - fixed electrode" is used to create high specific mechanical power microelectromechanical systems (MEMS). Two-dimensional electromechanical waves are found to arise in such a system. The occurrence of such excitations limits the maximum specific power of electromechanical converters - actuators, MEMS motors, and generators. On the other hand, this phenomenon opens up wide possibilities of using such structures.
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