NUMERICAL AND EXPERIMENTAL INVESTIGATION OF THE PHOTOTHERMAL EFFECT IN THIN FILMS OF MOLYBDENUM OXIDE DURING LASER ABLATION
S.D. Poletayev
Branch of the Federal Scientific Research Centre “Crystallography and Photonics,” Russian Academy of Sciences, Samara, Russia
Keywords: COMSOL modeling, thin films, laser ablation, nonlinear photothermal effect, resolution
Abstract
The study of the photothermal effect during laser ablation of a 45 nm thick molybdenum oxide film is carried out. A hypothesis on the relationship of the thermal conductivity coefficient of the dielectric film with the limiting value of the photothermal effect is presented. It is shown that, with a thermal conductivity coefficient of more than 5 W / (m• K), the rate of temperature change decreases sharply at the beginning of heating the film, which, together with the peculiarity (singularity?) of the temperature distribution, can have a multidirectional effect on the width of the track being formed. It has been experimentally established that, under the action of continuous laser radiation in the 45 nm thick molybdenum oxide film, it is possible to form tracks with a width almost 2 times smaller than the effective diameter of the laser beam.
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