Structuring of Copper Surface by Glow Discharge Plasma
A. V. Petrova, A. I. Safonov
Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
Keywords: glow discharge, surface treatment, copper sample, oxidation, microstructures, nanostructures, roughness
Abstract
This study demonstrates that the surface roughness of a copper sample can be controlled by treating it with glow discharge plasma. It is established that the main process affecting the morphology and composition of the surface is oxidation. Treatment causes various copper oxide nano- and microstructures on the surface of a copper sample. It is shown that, in the parameter range studied, the working gas pressure has a more significant effect on the formation of various structures than the glow discharge current density. As a result of the treatment, various stages of the surface oxidation are observed, caused by differences in the surface temperature.
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