Phase retrieval profilometer for in-process measurement of 3D microstructure surfaces.
A.Taguchi, H.Yamakita, Y.Takaya, T.Miyoshi, and S.Takahashi
Osaka
Pages: 16–24
Subsection: INFORMATION-MEASUREMENT SYSTEMS
Abstract
An optical method for measuring the profile of three-dimensional micro-surface structures is proposed. Spatial spectral information on a surface profile is obtained by measuring its diffraction intensity, from which the surface is reconstructed by using the phase retrieval. A surface with a staircase-like shape having four steps with each step 70 nm high was measured to demonstrate that the method works for arbitrary nonperiodic surface structures. The successfully reconstructed surface is shown. This diffraction method has a potential application in in-process measurements.
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