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Avtometriya

2003 year, number 6

Errors of diffractive structure formation by laser thermo-chemical writing

A. G. Poleshchuk
Novosibirsk
Pages: 34–39
Subsection: OPTICAL INFORMATION TECHNOLOGIES, ELEMENTS, AND SYSTEMS

Abstract

Distortions of geometrical sizes of the simplest diffractive structures written by the thermo-chemical method in a chromium film (80