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Avtometriya 2003 number 6
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Avtometriya
2003 year,
number 6
Errors of diffractive structure formation by laser thermo-chemical writing
A. G. Poleshchuk
Novosibirsk
Pages: 34–39
Abstract
Distortions of geometrical sizes of the simplest diffractive structures written by the thermo-chemical method in a chromium film (80