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Results of studying the errors of indirect inspection by means of computer simulations are reported. The inspection method is based on measuring spectra of reflection from additional reference substrates in a wide spectral range. Special software (Deposition Control Simulator) is developed, which allows one to estimate the influence of the inspection system parameters (noise of the photodetector array, operating spectral range of the spectrometer and errors of its calibration in terms of wavelengths, drift of the radiation source intensity, and errors in the refractive index of deposited materials) on the random and systematic errors of deposited layer thickness measurements. The direct and inverse problems of multilayer coatings are solved by using the OptiReOpt library. Curves of the random and systematic errors of measurements of the deposited layer thickness as functions of the layer thickness are presented for various values of the system parameters. Recommendations are given on using the indirect inspection method for the purpose of reducing the layer thickness measurement error.

This paper presents the results of modeling the most important component of a one-stage technology of writing kinoform lenses in thick photoresist layers with increased diffraction efficiency, involving the formation of reverse slopes of Fresnel zones with a steepness up to 90º by means of inclined laser beams. It is shown that this technique for writing volumetric structures in photoresists with low contrast (k = 3) make it possible to significantly increase the steepness of the inverse slopes of the zones, and in photoresists with an average contrast (k = 10), to form practically steep slopes.

The characteristics of the observed shift of spectral structures caused by the Zeeman effect in a spatially inhomogeneous magnetic field have been studied. It has been found that this shift can be varied by changing the width of the spectral structures, their forms, and methods and conditions of recording.яA method of accounting for the inhomogeneity of the magnetic field for optically thin and thick media has been proposed.

A three-axial microoptoelectromechanical (MOEM) angular rate transducer model based on the optical tunneling effect has been developed. The transfer function has been determined, and the effect of destabilizing factors on the characteristics of the triaxial MOEM angular rate transducer has been evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect has been calculated.

Scanning devices based on multiple-row focal plane arrays providing increased resolution impose much more strict requirements on alignment than single-row arrays. This paper presents a new method for measuring and estimating the scanning speed and the angle of orientation of a multiple-row focal plane array relative to the scanning direction - parameters that have the most significantly effect on the quality of the discrete image formed. The method is based on an analysis of the image of a simple test object - an optical gap. An algorithm for estimating these parameters is considered which ensures high-accuracy estimates under fairly weak requirements on the image quality of the test object. The estimate accuracy was calculated analytically and confirmed by simulation.

A method for classifying moving objects having a seismic impact on the ground surface is proposed based on the statistical analysis of the envelopes of received signals. The values of the components of the amplitude spectrum of the envelopes obtained by Hilbert and Fourier transformations are used as a criterion of classification. Examples illustrating the statistical properties of spectra and the operation of the seismic classifier are given for an ensemble of objects of four classes (person, group of people, large animal, car). It is shown that the computing procedures for processing seismic signals are quite simple and can be used in real-time systems with modest requirements to computational resources.

It is proposed to use weight coefficients of the bilateral filter to calculate the measure of similarity of image regions in optical flow calculation algorithms. The efficiency of using this measure is studied by an example of a three-dimensional recursive search algorithm. Weight coefficients are used for calculating the optical flow with subpixel accuracy by the Lucas -Kanade algorithm. A possibility of reducing the optical flow calculation error by means of using the proposed approaches is demonstrated by an example of processing of various types of images. A method of choosing the parameters of the weight functions of the bilateral filter is described and analyzed.

Frequency characteristics of the procedure of spline-smoothing of information coming in real time are obtained. A recurrent spline is studied from the standpoint of the theory of linear dynamical systems. The estimation of quality and sustainability of the recursive spline filter are described. The spline transformation laws identified in a frequency analysis are confirmed by the indicators of smoothing quality in the time domain.

A new method of loop closure based on storage of local maps of obstacles and meant for reducing an accumulated localization error is proposed. The advantage of this method in comparison with the earlier one is in reducing the amount of RAM. The testing results for the developed system and comparisons with analogues are presented.

This paper describes a method for estimating the location of a radiating target for a case of substantial prior uncertainty with respect to operating conditions of a triangulation measuring system. Comparative analysis results and practical recommendations on using the method are given.